Micro machining and ultra micro machining refer to the initial production and processing R technology for manufacturing micro size parts and ultra-small size parts. The emergence and development of precision machining in Dalian are closely related to integrated circuits. Integrated circuits require a large number of components to be manufactured in a small area of semiconductor material chip f to form a variety of complex functional circuits. Manufacturing automation is an important part of advanced manufacturing technology. Its role is not only to improve efficiency, improve labor productivity, improve working environment and workers' working conditions, but also to improve t accuracy and surface quality, avoid human errors caused by manual operation, and ensure doubt and stability.